Manufacturing method and apparatus for magnetic head sliders

ABSTRACT

Disclosed herein is a method including the steps of cutting a wafer to prepare a row block having a plurality of head elements arranged in a matrix, bonding a plate member to one side surface of the row block, bonding a row tool to another side surface of the row block bonded to the plate member opposite to the one side surface, and cutting the row block to prepare a row bar bonded to the row tool and having a row of the head elements. A bonding apparatus for realizing the above bonding steps is also disclosed.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a method and apparatus suitablefor mass production of uniform magnetic head sliders.

[0003] 2. Description of the Related Art

[0004] In a manufacturing process for a magnetic head slider, forexample, a magnetic head thin-film is formed on a substrate, and isthereafter subjected to lapping. In this lapping, the heights of amagnetic resistance layer and a gap in the magnetic head thin-film aremade constant. The heights of the magnetic resistance layer and the gapare required to have a high accuracy on the order of submicrons.Accordingly, a high working accuracy is required in a lapping apparatusfor lapping a row bar as a workpiece.

[0005] A conventional magnetic head manufacturing process includes thesteps of cutting a wafer to prepare a row bar having a plurality ofmagnetic head elements arranged in a row, and bonding the row bar to arow tool. This bonding step is carried out by using a bonding apparatusdisclosed in Japanese Patent Laid-open No. 10-277469, for example. Thisbonding apparatus is composed of an adhesive applying mechanism forapplying an adhesive in a given amount to the row tool, a rinkingmechanism for uniforming the adhesive between the row tool and the rowbar, and a presser mechanism for accelerating the curing of the adhesivein the condition where the row tool and the row bar are positioned. InJapanese Patent Laid-open No. 6-349222, there is proposed a methodincluding the steps of bonding a plurality of row bars to a row tool,and thereafter cutting off one of the row bars. However, in thisconventional method, the rigidity of the workpiece is reduced with therepetition of the cutting step, causing an adverse effect on thestraightness of the workpiece.

[0006] As mentioned above, the magnetic head slider is subjected tolapping so that the height of the magnetic resistance film becomesconstant. However, the row bar is very thin such that its thickness isabout 0.3 mm. Accordingly, it is difficult to directly lap the row barby the lapping apparatus, so that the row bar bonded to the row tool ispressed on a lap plate in lapping. During the lapping operation, aresistance in an electrical lapping guide element (ELG element)integrally formed in the row bar is always measured as known in U.S.Pat. No. 5,023,991 and Japanese Patent Laid-open No. 5-123960, forexample.

[0007] Then, whether or not the height of the magnetic resistance filmof each magnetic head element in the row bar has become a target heightis detected according to the measured resistance. When it is detectedthat the magnetic resistance film has been lapped to the target height,according to the measured resistance, the lapping operation is ended.Thereafter, the lapped surface of the row bar is worked to form flyingsurfaces of a plurality of magnetic head sliders. Then, the row bar iscut into parts having the plurality of magnetic head sliders. Finally,the row tool is heated to melt the adhesive bonding the row bar to therow tool, thereby produce the individual magnetic head sliders.

[0008] In this manner, a wafer is first cut to prepare a row bar havinga plurality of magnetic head elements arranged in a row, and the row baris then lapped to thereby allow simultaneous lapping of the magneticresistance films of the plural magnetic head elements. However, thereare variations on the order of submicrons in the height of the magneticresistance film between the individual magnetic head elements in the rowbar, according to the film forming accuracy of the magnetic resistancefilm or the bonding accuracy of the row bar to the row tool.Accordingly, such variations must be corrected in lapping the row bar,so as to mass-produce magnetic head sliders having uniformcharacteristics.

[0009] Various methods have conventionally been proposed to correct thevariations on the order of submicrons in lapping. For example, U.S. Pat.No. 5,607,346 has proposed a method including the steps of forming aplurality of holes in a row tool and respectively applying forces ofactuators through the holes to the row tool. However, each actuator isrequired to have a capability of applying a relatively large force, soas to obtain a desired pressure distribution. Accordingly, it isdifficult to manufacture such actuators for applying operational forcesto the row tool at multiple points, so that the spacing of thesemultiple points (holes) cannot be so decreased. As a result, it isdifficult to improve the working (lapping) accuracy of the row bar.

SUMMARY OF THE INVENTION

[0010] It is therefore an object of the present invention to provide abonding method and apparatus which can prevent the warpage and/ordistortion of a row bar bonded to a row tool.

[0011] It is another object of the present invention to provide alapping apparatus, row tool, and lapping method suitable for improvementin working accuracy.

[0012] In accordance with an aspect of the present invention, there isprovided a method comprising the steps of cutting a wafer to prepare arow block having a plurality of head elements arranged in a matrix;bonding a plate member to one side surface of said row block; bonding arow tool to another side surface of said row block bonded to said platemember opposite to said one side surface; and cutting said row block toprepare a row bar bonded to said row tool and having a row of said headelements.

[0013] Preferably, said plate member comprises a dummy wafer.Preferably, the above method further comprises the steps of bondinganother row tool to a cut surface of said row block remaining after saidcutting step; and repeating said cutting step for said remaining rowblock.

[0014] In accordance with another aspect of the present invention, thereis provided an apparatus for bonding a row block having a plurality ofhead elements arranged in a matrix to a plate member, comprising acarrier block having a positioning pin for positioning said row block; afirst preheating assembly for preheating said plate member; a secondpreheating assembly for preheating said row block; a rail assemblyhaving a first block for mounting said plate member and a second blockfor substantially vertically holding said plate member in cooperationwith said first block; an adhesive applying assembly for applying anadhesive to one side surface of said plate member held in said railassembly; a rinking assembly having a rinking base for mounting saidcarrier block, a damper for clamping said plate member mounted on saidcarrier block, a drive mechanism for reciprocating said clamper, and afirst presser block for pressing said row block mounted on said carrierblock against said one side surface of said plate member; and a bondingassembly having a bonding base for mounting said carrier block, apositioning block for positioning said plate member and said row blockmounted on said carrier block, a second presser block for pressing saidrow block against said one side surface of said plate member, and an airnozzle for spraying air to a bonding portion between said row block andsaid plate member.

[0015] Preferably, said carrier block is in L-shaped configuration andhas a hole for vacuum suction. The first preheating assembly has a firstheating block having a plurality of grooves each for receiving saidplate member, and a first heater for heating said first heating block.The second preheating assembly has a second heating block for placingsaid row block, and a second heater for heating said second heatingblock.

[0016] Preferably, said first block of said rail assembly is in L-shapedconfiguration, and said rail assembly further has a third block forpushing one end of said plate member mounted on said L-shaped firstblock, and a third heater for heating said first block. The adhesiveapplying assembly has a syringe for dispensing said adhesive, atemperature control block for heating said syringe to a giventemperature, a cylinder for vertically moving said syringe, and a robotfor moving said syringe along said rail assembly.

[0017] Preferably, said drive mechanism of said rinking assembly has amotor, a rinking stroke adjusting disc mounted on said motor, and aconnecting rod for connecting said rinking stroke adjusting disc andsaid damper and having a connecting end offset from an output shaft ofsaid motor.

[0018] In accordance with a further aspect of the present invention,there is provided an apparatus for lapping a row bar having a pluralityof head elements arranged in a row, comprising a lap plate for providinga lapping surface; a row tool having an upper surface, a lower surfaceto which said row bar is bonded, and a plurality of bend cells formed bya plurality of slits; an air plate fixed to said upper surface of saidrow tool and having a plurality of holes respectively corresponding tosaid plurality of bend cells; a presser mechanism for pressing said rowbar bonded to said lower surface of said row tool against said lappingsurface of said lap plate; a plurality of electro-pneumatic conversionregulators respectively connected to said plurality of holes of said airplate; and a compressed air source connected to said plurality ofelectro-pneumatic conversion regulators.

[0019] The row tool further has a parallel spring mechanism and a pairof fixed cells formed on the opposite sides of said bend cells, each ofsaid fixed cells having a width larger than that of each of said bendcells. Preferably, the upper surface of said row tool and the lowersurface of said air plate are polished so as to have a flatness of 3 μmor less. Preferably, said presser mechanism has a lap head for pressingsaid row bar on said lapping surface by a self-weight, and a pneumaticcylinder for adjustably applying a lapping pressure to said lap head.

[0020] In accordance with a still further aspect of the presentinvention, there is provided a method of lapping a row bar having aplurality of head elements arranged in a row, comprising the steps ofproviding a lapping surface by a lap plate; pressing said row bar bondedto a lower surface of a row tool having a plurality of bend cells formedby a plurality of slits, against said lapping surface; and applyingindividually adjustable air pressures to said bend cells, respectively,through an air plate fixed to an upper surface of said row tool andhaving a plurality of holes respectively corresponding to said bendcells; whereby said row bar is displaced at multiple points in lapping.

[0021] In accordance with a still further aspect of the presentinvention, there is provided a row tool to which a row bar having aplurality of head elements arranged in a row is adapted to be bonded,comprising a plurality of bend cells formed by a plurality of slits; apair of fixed cells formed on the opposite sides of said bend cells,each of said fixed cells having a width larger than that of each of saidbend cells; and a parallel spring mechanism.

[0022] In accordance with a still further aspect of the presentinvention, there is provided a row tool assembly comprising a row toolhaving an upper surface, a plurality of bend cells formed by a pluralityof slits, a parallel spring mechanism, an insert hole extendinghorizontally, and a plurality of first holes communicating with saidinsert hole and opening to said upper surface; an air lead frameinserted in said insert hole of said row tool and having a plurality ofair reservoirs respectively communicating with said first holes of saidrow tool; and an air plate fixed to said upper surface of said row tooland having a plurality of second holes respectively communicating withsaid first holes of said row tool.

[0023] The above and other objects, features and advantages of thepresent invention and the manner of realizing them will become moreapparent, and the invention itself will best be understood from a studyof the following-description and appended claims with reference to theattached drawings showing some preferred embodiments of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS

[0024]FIGS. 1A to 1C are perspective views for illustrating a process ofbonding a row block to a dummy wafer;

[0025]FIGS. 2A to 2C are perspective views for illustrating a process ofbonding an integrated block to a row tool;

[0026]FIGS. 3A and 3B are perspective views for illustrating a processof cutting the row block;

[0027]FIG. 4 is an elevational view of a dummy wafer bonding apparatus;

[0028]FIG. 5 is a plan view of FIG. 4;

[0029]FIG. 6A is an elevational view of a dummy wafer carrier block;

[0030]FIG. 6B is a plan view of FIG. 6A;

[0031]FIG. 7A is a right side view of FIG. 6A;

[0032]FIG. 7B is a left side view of FIG. 6A;

[0033]FIG. 8 is an elevational view of an adhesive applying assembly;

[0034]FIG. 9 is a right side view of FIG. 8;

[0035]FIG. 10 is a plan view of FIG. 8;

[0036]FIG. 11 is an elevational view of a rail assembly;

[0037]FIG. 12 is a right side view of FIG. 11;

[0038]FIG. 13 is a plan view of FIG. 11;

[0039]FIG. 14 is an elevational view of an integrated rinking assemblyand bonding assembly;

[0040]FIG. 15 is a right side view of the bonding assembly;

[0041]FIG. 16 is a left side view of the rinking assembly;

[0042]FIG. 17 is a plan view of FIG. 14;

[0043]FIG. 18 is a left side view of a first preheating assembly;

[0044]FIG. 19 is a plan view of FIG. 18;

[0045]FIG. 20 is a left side view of a second preheating assembly;

[0046]FIG. 21 is a plan view of FIG. 20;

[0047]FIG. 22 is an elevational view of an operation panel;

[0048]FIG. 23 is an elevational view for illustrating the operation ofthe adhesive applying assembly;

[0049]FIG. 24 is an elevational view for illustrating the operation ofthe rinking assembly;

[0050]FIG. 25 is an elevational view for illustrating the operation ofthe bonding assembly;

[0051]FIG. 26 is an elevational view of a row tool bonding apparatus;

[0052]FIG. 27 is a plan view of FIG. 26;

[0053]FIG. 28A is an elevational view of a row tool carrier block;

[0054]FIG. 28B is a plan view of FIG. 28A;

[0055]FIG. 29A is a right side view of FIG. 28A;

[0056]FIG. 29B is a left side view of FIG. 28A;

[0057]FIG. 30 is an elevational view of an adhesive applying assembly inthe row tool bonding apparatus;

[0058]FIG. 31 is a right side view of FIG. 30;

[0059]FIG. 32 is a plan view of FIG. 30;

[0060]FIG. 33 is a left side view of a first preheating assembly in therow tool bonding apparatus;

[0061]FIG. 34 is a plan view of FIG. 33;

[0062]FIG. 35 is a vertical sectional view of a lapping apparatus;

[0063]FIG. 36 is a plan view of FIG. 35;

[0064]FIG. 37 is an exploded perspective view of a row tool and an airplate in the lapping apparatus;

[0065]FIG. 38 is an exploded sectional view of the row tool and the airplate shown in FIG. 37;

[0066]FIG. 39 is an elevational view of the row tool;

[0067]FIGS. 40A and 40B are elevational views for illustrating theinfluence of a lap pressure;

[0068]FIG. 41 is an elevational view for schematically illustrating abend condition;

[0069]FIG. 42 is a sectional view of a row tool assembly employing anair lead frame;

[0070]FIG. 43A is a plan view of the air lead frame;

[0071]FIG. 43B is a cross section taken along the line B-B in FIG. 43A;

[0072]FIG. 44A is an elevational view showing a modification of the rowbar bonded to the row tool, in which the row bar is semicut; and

[0073]FIG. 44B is an elevational view showing another modification ofthe row bar bonded to the row tool, in which the row bar is completelycut.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0074] There will first be described a row bar preparation method withreference to FIGS. 1A to 3B. This row bar preparation method includes arow block bonding process shown in FIGS. 1A to 1C, a row tool bondingprocess shown in FIGS. 2A to 2C, and a row block cutting process shownin FIGS. 3A and 3B.

[0075] As shown in FIG. 1A, an adhesive R1 is first applied to one sidesurface of a dummy wafer 12. As shown in FIG. 1B, a row block 11 is nextpressed on the side surface of the dummy wafer 12 to which the adhesiveR1 has been applied, and the dummy wafer 12 is horizontally reciprocatedplural times relative to the row block 11 to uniform the adhesive R1between the row block 11 and the dummy wafer 12. The row block 11 isprovided by cutting a wafer, and has a plurality of magnetic headelements arranged in a matrix. The dummy wafer 12 is formed of the samematerial as that of the row block 11. The dummy wafer 12 may be replacedby a plate member having a coefficient of thermal expansion equal to orsimilar to that of the row block 11.

[0076] The step shown in FIG. 1B is generally referred to as a rinkingstep. After the rinking step, a pressure head 15 is pressed on one sidesurface of the row block 11 opposite to the bonding surface with respectto the dummy wafer 12 as shown in FIG. 1C, and air is sprayed againstthe bonding portion between the row block 11 and the dummy wafer 12 byusing an air nozzle, for example, thereby curing the adhesive R1 to bondthe row block 11 to the dummy wafer 12. The reason for bonding of therow block 11 to the dummy wafer 12 is to increase the rigidity of therow block 11.

[0077] In the next stage, an adhesive R2 is applied to one side surfaceof a row tool 10 as shown in FIG. 2A. As shown in FIG. 2B, an integratedblock 13 prepared by bonding the row block 11 to the dummy wafer 12 asmentioned above is next pressed on the side surface of the row tool 10to which the adhesive R2 has been applied, and the row tool 10 ishorizontally reciprocated plural times relative to the integrated block13 to uniform the adhesive R2 between the row tool 10 and the integratedblock 13. This step is also generally referred to as a rinking step. Asshown in FIG. 2C, the pressure head 15 is pressed on one side surface ofthe integrated block 13 opposite to the bonding surface with respect tothe row tool 10, and the adhesive R2 is cured to thereby bond theintegrated block 13 to the row tool 10.

[0078] In the next stage, the row block 11 bonded to the row tool 10 iscut by using a slicer 16 as shown in FIG. 3A to thereby obtain a singlerow bar 14 bonded to the row tool 10 as shown in FIG. 3B. The row bar 14has a plurality of magnetic head elements arranged in a row. The row bar14 bonded to the row tool 10 is subjected to a subsequent magnetic headslider manufacturing process such as a lapping process. The remainingintegrated block 13 from which the row bar 14 has been separated isbonded to another row tool, and the processes of FIGS. 2A to 3B arerepeated.

[0079] According to this method, the rigidity of the row block 11 ishigher than that of the single row bar 14. Therefore, the warpage of therow block 11 due to the pressure applied in the bonding step and thedistortion of the row bar 14 due to the stress in the cutting step canbe reduced. Further, according to this method, the dummy wafer 12 ispreliminarily bonded to the row block 11 to increase the rigidity of therow block 11. Therefore, even when the cutting of the row block 11 isrepeated, the rigidity of the row block 11 is not decreased, therebypreventing an adverse effect on the straightness of the row bar 14 dueto the repetition of the cutting of the row block 11.

[0080] There will now be described bonding apparatus according to thepresent invention suitable for carrying out the above-mentioned bondingmethod with reference to FIGS. 4 to 34. FIG. 4 is an elevational view ofan apparatus for bonding the dummy wafer 12 to the row block 11, andFIG. 5 is a plan view of this bonding apparatus. The dummy wafer bondingapparatus shown in FIGS. 4 and 5 includes an adhesive applying assembly2, rail assembly 3, rinking assembly 4, bonding assembly 5, firstpreheating assembly 6, second preheating assembly 7, operation panel 8,and control unit 9.

[0081] In a bonding operation by this bonding apparatus, a dummy wafercarrier block 1 shown in FIGS. 6A to 7B is used. The dummy wafer carrierblock 1 is in L-shaped configuration as viewed in side elevation asshown in FIGS. 7A and 7B. The carrier block 1 has a pin 20 forpositioning the row block 11 and a groove 21 for accepting an extraadhesive from the bonding surface between the row block 11 and the dummywafer 12. The carrier block 1 further has a groove 24 for use inabutment of the row block 11 and the dummy wafer 12 in the bondingassembly 5, and also has a groove 25 for facilitating the carriage ofthe carrier block 1.

[0082] The L-shaped configuration of the carrier block 1 is intended toallow the side surface of the dummy wafer 12 opposite to the bondingsurface with respect to the row block 11 to be supported by the carrierblock 1. The carrier block 1 further has round holes 22 and elongatedholes 23 for vacuum suction to fix the row block 11 and the dummy wafer12. The length of each elongated hole 23 is slightly shorter than thatof the row block 11 and the dummy wafer 12.

[0083] Referring to FIG. 8, there is shown an elevational view of theadhesive applying assembly 2. FIG. 9 is a right side view of FIG. 8, andFIG. 10 is a plan view of FIG. 8. The adhesive applying assembly 2 has asyringe 30 for dispensing an adhesive in a given amount. The syringe 30is surrounded by a temperature control block 32 for heating the syringe30. The syringe 30 is mounted on a syringe mounting member 31. Thesyringe mounting member 31 is vertically movable by a cylinder 34. Thecylinder 34 is mounted on a support member 36. The support member 36 ismounted on a robot 35 horizontally movable along the rail assembly 3.Further, the vertical position of a syringe tip 30 a in lowering thesyringe 30 by operating the cylinder 34 is finely adjustable by anadjusting screw 33.

[0084] As the adhesive, a hot-melt adhesive is used. The temperaturecontrol block 32 performs heat management of the syringe 30 so that thetemperature of the syringe 30 can be arbitrarily set according to theadhesive to be used. In this preferred embodiment, the temperature ofthe syringe 30 is set to 140° C. The syringe mounting member 31 isformed of electrically-conductive heat-resistant plastic superior inchemical resistance. The support member 36 has two adjusting screws 37for fine adjustment of the position of the syringe tip 30 a along thedepth of this assembly. That is, by rotating the adjusting screws 37,the support member 36 on the robot 35 can be adjusted in position alongthe depth of this assembly to effect fine adjustment of the position ofthe syringe tip 30 a.

[0085] Referring to FIG. 11, there is shown an elevational view of therail assembly 3. FIG. 12 is a right side view of FIG. 11, and FIG. 13 isa plan view of FIG. 11. The rail assembly 3 has an L-shaped block 40 forsetting the dummy wafer 12, a heater 41 for heating the L-shaped block40, and a push block 42 for pushing one end of the dummy wafer 12 on theL-shaped block 40.

[0086] A presser block 43 is adjustably fixed on the L-shaped block 40.The presser block 43 serves both to guide the insertion of the dummywafer 12 in pushing the dummy wafer 12 and to press the dummy wafer 12on the L-shaped block 40. The rail assembly 3 further has a base 44 formounting the L-shaped block 40, a positioning block 45 for positioningthe L-shaped block 40, a pair of L-shaped support blocks 46 forsupporting the base 44, and a pan 47 for receiving the adhesive from thesyringe 30.

[0087] The L-shaped block 42 is formed with two round holes 48 forsucking a lower portion of the dummy wafer 12 and an elongated hole 49for sucking a side surface of the dummy wafer 12. By vacuum suction ofthe dummy wafer 12 through these holes 48 and 49, error detection ismade in the case that the dummy wafer 12 is not set in a properposition. The heater 41 performs heat management of the dummy wafer 12set on the L-shaped block 40 so that the temperature of the dummy wafer12 can be set to an arbitrary temperature. In this preferred embodiment,the temperature of the dummy wafer 12 is set to 100° C. The presserblock 43 is provided with two bearings 50 opposed to a front surface ofthe dummy wafer 12, so as to smoothly insert the dummy wafer 12 betweenthe L-shaped block 40 and the presser block 43. Accordingly, the dummywafer 12 can be set in a given position without any damage thereto.

[0088] Referring to FIG. 14, there is shown an elevational view of therinking assembly 4 and the bonding assembly 5. FIG. 15 is an right sideview of FIG. 14, FIG. 16 is a left side view of FIG. 14, and FIG. 17 isa plan view of FIG. 14. In this preferred embodiment, the rinkingassembly 4 and the bonding assembly 5 are integrated together. Therinking assembly 4 has a rinking base 60 for setting the carrier block1, a heater 61 for heating the rinking base 60, a pair of clamp blocks62 for clamping the dummy wafer 12, a clamp cylinder 63 for operatingthe clamp blocks 62, and a retraction cylinder 64 for setting the clampcylinder 63 on the rinking base 60.

[0089] The rinking assembly 4 further has a drive mechanism forreciprocating the dummy wafer 12. This drive mechanism includes a motor68, a rinking stroke adjusting disc 67 mounted on the motor 68, aconnecting rod 66 for connecting the clamp blocks 62 and the rinkingstroke adjusting disc 67 and having a connecting end offset from anoutput shaft of the motor 68, and a linear motion guide (LM guide) 65.The rinking assembly 4 further has a pressure block 69 for pressing therow block 11, an LM guide 70, and a cylinder 71 for driving the pressureblock 69.

[0090] The clamp blocks 62 are formed of electrically-conductiveheat-resistant plastic. A rubber member is provided on a contact surfaceof the pressure block 69 coming into contact with the row block 11, soas to prevent chipping of the dummy wafer 12 and the row block 11. Therinking base 60 is provided with a pin 72 for positioning the carrierblock 1. Further, although not shown, the rinking base 60 is formed witha round hole and an elongated hole for vacuum suction to fix the carrierblock 1 and the row block 11.

[0091] The rinking base 60 is fixed through a heat insulating block 76to an angled base 75. As shown in FIG. 16, the angled base 75 can bemounted on a pair of angled base mounting plates 92 at an arbitraryangle. In this preferred embodiment, this mounting angle is set to about40°. The angled base mounting plates 92 are fixed to a common base 93.The heater 61 performs heat management of the carrier block 1 on therinking base 60 so that the temperature of the carrier block 1 can beset to an arbitrary temperature. In this preferred embodiment, thetemperature of the carrier block 1 is set to about 140° C. By changingthe mounted position of the rinking stroke adjusting disc 67, thereciprocation stroke of the dummy wafer 12 can be changed.

[0092] The bonding assembly 5 has a bonding base 80 for setting thecarrier block 1, a positioning block 81 for positioning the dummy wafer12 and the row block 11, and a push block 82 for pushing the sidesurfaces of the dummy wafer 12 and the row block 11 opposite to the sidesurfaces to be positioned by the positioning block 81. The push block 82is horizontally movable by a cylinder 83. The cylinder 83 is verticallymovable by a cylinder 84. The bonding assembly 5 further has a presserblock 85 for pressing the row block 11, a cylinder 87 for moving thepresser block 85, and an LM guide 86 for guiding a linear motion of thepresser block 85. The bonding assembly 5 is further provided with twoair nozzles 88 for cooling the bonding surface between the dummy wafer12 and the row block 11.

[0093] The push block 82 and the positioning block 81 are formed ofelectrically-conductive heat-resistant plastic. A rubber member isprovided on a contact surface of the push block 82 with respect to thedummy wafer 12 and the row block11, and a rubber member is also providedon a contact surface of the presser block 85 with respect to the rowblock 11, thereby preventing chipping of the dummy wafer 12 and the rowblock 11. The bonding base 80 is formed with an elongated hole 89 forvertical movement of the push block 82, and when the push block 82 is ina lowered position, the push block 82 is not projected from the uppersurface of the bonding base 80.

[0094] The bonding base 80 is further formed with a round hole 94 and anelongated hole 95 for vacuum suction to fix the row block 11 and thedummy wafer 12. The bonding base 80 is mounted through a support block90 to the angled base 75. The cylinder 83 is provided with a dedicatedregulator for regulating a pushing force to be applied to the push block82.

[0095] Referring to FIG. 18, there is shown a left side view of thefirst preheating assembly 6. FIG. 19 is a plan view of FIG. 18. Thefirst preheating assembly 6 has a heating block 100 having a pluralityof grooves 103 for receiving a plurality of dummy wafers 12, a heater101 for heating the heating block 100, a pair of heat insulating blocks102 for blocking heat transfer to the common base 93.

[0096] The heating block 100 has a comb-like shape to improve theefficiency of heat conduction to the dummy wafers 12. The heater 101performs heat management of the dummy wafers 12 inserted in the grooves103 of the heating block 100 so that the temperature of the dummy wafers12 can be set to an arbitrary temperature. In this preferred embodiment,the temperature of the dummy wafers 12 is set to 100° C. The heatinsulating blocks 102 are formed of electrically-conductiveheat-resistant plastic. Pins 104 for mounting and positioning theheating block 100 are press-fitted with the heat insulating blocks 102.

[0097] Referring to FIG. 20, there is shown a left side view of thesecond preheating assembly 7. FIG. 21 is a plan view of FIG. 20. Thesecond preheating assembly 7 has a heating block 110 for placing aplurality of row blocks 11 to heat them, a heater 111 for heating theheating block 110, and a pair of heat insulating blocks 112 for blockingheat transfer to the common base 93. The heating block 110 has a raisedportion 113 having a width slightly smaller than the length of each rowblock 11, so as to facilitate handling of the row blocks 11.

[0098] The heater 111 performs heat management of the row blocks 11placed on the heating block 110 so that the temperature of the rowblocks 11 can be set to an arbitrary temperature. In this preferredembodiment, the temperature of the row blocks 11 is set to about 100° C.The heat insulating blocks 112 are formed of electrically-conductiveheat-resistant plastic. Pins 114 for mounting and positioning theheating block 110 are press-fitted with the heat insulating blocks 112.

[0099] Referring to FIG. 22, there is shown an elevational view of theoperation panel 8. The operation panel 8 has a plurality of operationbuttons 120, 121, and 122 respectively for the adhesive applyingassembly 2, the rinking assembly 4, and the bonding assembly 5, anemergency stop button 123, and an alarm reset button 124. The operationpanel 8 further has a plurality of alarm indicator lamps 125, 126, and127 respectively corresponding to the adhesive applying assembly 2, therinking assembly 4, and the bonding assembly 5, an alarm indicator lamp128 for indicating any error other than that of each assembly, anoperation indicator lamp 129, and a manual/auto selector switch 130.

[0100] Referring again to FIG. 4, the control unit 9 has a sequencer,syringe controller, robot controller, motor controller, solenoid valvefor driving each cylinder, vacuum ejector for work vacuum, vacuumsensor, and temperature control unit for heat management of each heater.

[0101] The operation of the above-mentioned dummy wafer bondingapparatus will now be described. First, the dummy wafer 12, the rowblock 11, and the carrier block 1 are placed and heated on the firstpreheating assembly 6, the second preheating assembly 7, and the rinkingassembly 4, respectively. The dummy wafer 12, the row block 11, and thecarrier block 1 are heated to about 100° C. The dummy wafer 12 on thefirst preheating assembly 6 is moved to the rail assembly 3 in such amanner that the bonding surface of the dummy wafer 12 is orientedupward. Then, the operation button 120 for the adhesive applyingassembly 2 on the operation panel 8 is depressed to start applying theadhesive to the bonding surface of the dummy wafer 12.

[0102] Whether or not the dummy wafer 12 is set in a proper position isdetected by a vacuum through the round holes 48 and the elongated hole49 of the rail assembly 3. As shown in FIG. 23, the robot 35 is moved sothat the tip 30 a of the syringe 30 comes to a position spaced apart byseveral millimeters from the left end of the bonding surface of thedummy wafer 12. As shown by an arrow A in FIG. 23, the cylinder 33 isoperated to lower the syringe 30 to a position where the distancebetween the tip 30 a of the syringe 30 and the bonding surface of thedummy wafer 12 becomes tens of micrometers.

[0103] After lowering the syringe 30 to such a given position, the robot35 is moved along the rail assembly 3 as shown by an arrow B in FIG. 23to move the tip 30 a of the syringe 30 to a position spaced apart byseveral millimeters from the right end of the bonding surface of thedummy wafer 12. During this movement of the tip 30 a of the syringe 30,the adhesive is applied from the tip 30 a to the bonding surface of thedummy wafer 12. Thereafter, the cylinder 33 is operated to raise thesyringe 30 as shown by an arrow C in FIG. 23, and the robot 35 is movedto the initial position. Thereafter, the vacuum is released. Thus, theapplication of the adhesive to the bonding surface of the dummy wafer 12is completed.

[0104] After completing the application of the adhesive as mentionedabove, the dummy wafer 12 is placed on the carrier block 1 set on therinking assembly 4. Further, one of the row blocks 11 is picked up fromthe second preheating assembly 7, and set on the carrier block 1 in sucha manner that a side surface of the row block 11 comes to abutmentagainst the positioning pin 20 of the carrier block 1 and another sidesurface of the row block 11 is put on the bonding surface of the dummywafer 12 to which the adhesive has been applied. After checking whetherthe left side surface of the carrier block 1 is in abutment against thepositioning pin 72 of the rinking base 60, the operation button 121 forthe rinking assembly 4 on the operation panel 8 is depressed to startthe rinking.

[0105] First, it is detected by a vacuum whether or not the carrierblock 1 is set in a proper position on the rinking base 60 and the rowblock 11 is set in a proper position. Then, the presser cylinder 71 isoperated to lower the presser block 69 as shown by an arrow A in FIG. 24and press the side surface of the row block 11 opposite to the bondingsurface. Then, the retraction cylinder 64 is operated to raise the clampblocks 62 to a clamp position as shown by arrows B in FIG. 24. Then, theclamp cylinder 63 is operated to move the clamp blocks 62 as shown byarrows C in FIG. 24 and clamp the dummy wafer 12.

[0106] Then, the motor 68 for rinking operation is operated toreciprocate the dummy wafer 12 clamped by the clamp blocks 62 relativeto the row block 11 as shown by an arrow D in FIG. 24. Afterreciprocating the dummy wafer 12 plural times, the clamp blocks 62, theretraction cylinder 64, and the presser block 69 are returned to theirinitial positions, and the vacuum is released, thus completing therinking. Thereafter, the carrier block 1 is moved to the bondingassembly 5.

[0107] In the bonding assembly 5, the carrier block 1 is brought intoabutment against the positioning block 81. In this condition, theoperation button 122 for the bonding assembly 5 on the operation panel 8is depressed to start the bonding of the dummy wafer 12 and the rowblock 11. As in the rinking assembly 4, a vacuum is operated to raisethe cylinder 84. As shown in FIG. 25, the cylinder 83 is operated tomove the push block 82 until it comes to abutment against the left sidesurfaces of the dummy wafer 12 and the row block 11 as shown by an arrowA in FIG. 25.

[0108] Thereafter, the cylinder 87 is operated to lower the presserblock 85 as shown by an arrow B in FIG. 25, thereby pressing the sidesurface of the row block 11 opposite to the bonding surface. During thispressing by the presser block 85, air is sprayed for several secondsfrom the air nozzles 88 to cool the bonding portion. After cooling thebonding portion, the cylinders 83, 84, and 87 are sequentially returnedto their initial positions, and the vacuum is finally released tocomplete the operation of the bonding assembly 5. Thus, the row-block 11is bonded to the dummy wafer 12, thereby obtaining the integrated block13. The integrated block 13 is then bonded to the row tool 10 by a rowtool bonding apparatus shown in FIGS. 26 and 27.

[0109] Referring to FIG. 26, there is shown an elevational view of therow tool bonding apparatus for bonding the row tool 10 to the integratedblock 13. FIG. 27 is a plan view of FIG. 26. The row tool bondingapparatus includes an adhesive applying assembly 152, rail assembly 153,rinking assembly 154, and bonding assembly 155. The row tool bondingapparatus further includes a first preheating assembly 156, secondpreheating assembly 157, operation panel 158, and control unit 159.

[0110]FIG. 28A is an elevational view of a carrier block 151 for the rowtool 10, and FIG. 28B is a plan view of FIG. 28A. FIG. 29A is a rightside view of FIG. 28A, and FIG. 29B is a left side view of FIG. 28A. Thecarrier block 151 is in L-shaped configuration as viewed in sideelevation as shown in FIGS. 29A and 29B. The carrier block 151 has a pin160 for positioning the integrated block 13, and a groove 161 for makingthe bonding surfaces of the row tool 10 and the integrated block 13 atthe same level, because the row tool 10 and the integrated block 13 havedifferent thicknesses.

[0111] The carrier block 151 further has a groove 164 for use inabutment of the row tool 10 and the integrated block 13 in the bondingassembly 155, and also has a groove 165 for facilitating the carriage ofthe carrier block 151. The L-shaped configuration of the carrier block151 is intended to allow the row tool 10 to be easily placed on thecarrier block 151. The carrier block 151 further has round holes 162 andelongated holes 163 for vacuum suction to fix the row tool 10 and theintegrated block 13. The length of each elongated hole 163 is slightlyshorter than that of the row tool 10 and the integrated block 13.

[0112] Referring to FIG. 30, there is shown an elevational view of theadhesive applying assembly 152. FIG. 31 is a right side view of FIG. 30,and FIG. 32 is a plan view of FIG. 30. The adhesive applying assembly152 has a syringe 170 for dispensing an adhesive in a given amount. Thesyringe 170 is mounted on a syringe mounting member 171. As theadhesive, a cyano-containing instantaneous adhesive is used.

[0113] The syringe mounting member 171 is vertically movable by acylinder 174 mounted on a support member 176. The support member 176 ismounted on a robot 175 horizontally movable along the rail assembly 153.A member 172 is connected to the syringe mounting member 171, and a fineadjusting screw 173 is provided on the member 172. By rotating the fineadjusting screw 173, the vertical position of a syringe tip 170 a of thesyringe 170 in lowering the syringe 170 by operating the cylinder 174can be finely adjusted.

[0114] The support member 176 is provided with two adjusting screws 177.By rotating the adjusting screws 177, the position of the syringe tip170 a along the depth of this assembly can be finely adjusted. The railassembly 153 is similar to the rail assembly 3 mentioned above, but thesize of the rail assembly 153 for supporting the row tool 10 isdifferent from the size of the rail assembly 3 for supporting the dummywafer 12.

[0115] The rinking assembly 154 is also similar to the rinking assembly4 mentioned above, but the size of an elongated hole for vacuum suctionof the carrier block 151 on a rinking base of the rinking assembly 154is different from the size of the elongated hole for vacuum suction ofthe carrier block 1 on the rinking base 60 of the rinking assembly 4.The bonding assembly 155 is also similar to the bonding assembly 5mentioned above except that some changes are made to support the carrierblock 151. That is, the elongated hole 95 for vacuum suction on thebonding base 80, the elongated hole 89 for the push block 82 on thebonding base 80, the positioning block 81, and the cooling air nozzles88 for the carrier block 1 are changed in size and position so as tosupport the carrier block 151 in the bonding assembly 154.

[0116] Referring to FIG. 33, there is shown a left side view of thefirst preheating assembly 156. FIG. 34 is a plan view of FIG. 33. Thefirst preheating assembly 156 has a heating block 180 having a pluralityof grooves 183 for receiving a plurality of row tools 10, a heater 181for heating the heating block 180, and a pair of heat insulating blocks182 for blocking heat transfer to the common base 93.

[0117] The heating block 180 has a two-stepped upper surface tofacilitate the handling of the row tools 10. The heating block 180 has acomb-like shape with the plural grooves 183 to improve the efficiency ofheat conduction to the row tools 10. The heat insulating blocks 182 areformed of electrically-conductive heat-resistant plastic. Pins 184 formounting and positioning the heating block 180 are press-fitted with theheat insulating blocks 182. The second preheating assembly 157 issimilar to the first preheating assembly 6 of the dummy wafer bondingapparatus mentioned above. The operation panel 158 and the control unit159 are also similar to the operation panel 8 and the control unit 9 ofthe dummy wafer bonding apparatus, respectively.

[0118] The operation of the row tool bonding apparatus is similar to theoperation of the dummy wafer bonding apparatus mentioned above with theexception that the row block 11 and the dummy wafer 12 are bondedtogether in the dummy wafer bonding apparatus, whereas the integratedblock 13 and the row tool 10 are bonded together in the row tool bondingapparatus. The workpiece, i.e., the assembly of the integrated block 13and the row tool 10 as obtained by the dummy wafer bonding apparatus andthe row tool bonding apparatus mentioned above is set on a cuttingslicer, and the row block 11 is cut by the slicer to obtain the singlerow bar 14 bonded to the row tool 10 and separated from the integratedblock 13. The remaining integrated block 13 is bonded to another rowtool by using the row tool bonding apparatus to repeat similar cuttingand bonding.

[0119] The row bar 14 bonded to the row tool 10 is polished by using alapping apparatus 200 described below. Referring to FIG. 35, there isshown a sectional view of the lapping apparatus 200. FIG. 36 is a planview of the lapping apparatus 200. The lapping apparatus 200 is composedof a lap plate 202 for providing a lapping surface 202 a, and a lap unit204. The lap unit 204 includes a lap base 210 mounted through an arm 208to a rotating shaft 206, and a lap head 214 pivotably mounted to the lapbase 210 by a ball joint 212 fixed to the lap base 210.

[0120] The lap base 210 has an opening 215, and the lap head 214 isinserted in the opening 215. A plurality of (e.g., four) seats 216 areprovided on the lower surface of the lap base 210, and the seats 216slide on the lapping surface 202 a. A row tool 218 is fixed to the laphead 214 by screws, for example. An air plate 220 is fixed to the uppersurface of the row tool 218. Three pneumatic cylinders 222 for applyingair pressure to the lap head 214 are provided above the lap head 214.

[0121] Each pneumatic cylinder 222 is connected through tubes 224 and226 to an electro-pneumatic conversion regulator (not shown) and acompressed air source 228. The air plate 220 is formed with a pluralityof rectangular holes to be hereinafter described, and each rectangularhole is connected through an air tube 230 to an electro-pneumaticconversion regulator 232. Each electro-pneumatic conversion regulator232 is connected to the compressed air source 228.

[0122] In lapping the row bar 14 bonded to the row tool 218, the lapplate 202 is rotated in a direction of arrow A in FIG. 36 by a motor(not shown), and the lap unit 204 is swung about the rotating shaft 206in a direction of arrow S in FIG. 36 by a drive mechanism (not shown).The lap plate 202 is rotated at about 50 rpm during rough lapping, androtated at about 15 rpm during finish lapping. On the other hand, thelap unit 204 is swung about 10 times per minute both during roughlapping and during finish lapping.

[0123] Referring to FIG. 37, there is shown an exploded perspective viewof the row tool 218 and the air plate 220 fixed to the row tool 218.FIG. 38 is an exploded sectional view of the row tool 218 and the airplate 220. The air plate 220 is fixed by screws to the row tool 218 inthe vicinity of a portion shown by an arrow 221 in FIG. 38. The row tool218 and the air plate 220 are formed of stainless steel, for example.The row tool 218 has a plurality of rectangular bend cells 236 formed bya plurality of vertical slits 234 and extending in a longitudinaldirection, and a pair of fixed cells 238 formed on the opposite sides ofthe bend cells 236. Each of the fixed cells 238 has a width larger thanthat of each bend cell 236.

[0124] As best shown in FIG. 38, the row tool 218 is formed with arectangular hole 240 and an L-shaped hole or slit 242, thereby formingtwo thin-walled portions 244 and 246. These thin-walled portions 244 and246 are parallel to each other and have the same wall thickness, therebyforming a parallel spring mechanism. The air plate 220 is formed with aplurality of rectangular holes 250 respectively corresponding to theplural bend cells 236 of the row tool 218. Each rectangular hole 250 isconnected through a hole 252 to the corresponding air tube 230. Theupper surface of the row tool 218 and the lower surface of the air plate220 are polished so as to have a flatness of 3 μm or less.

[0125] The row bar 14 to be lapped is bonded to a front end portion ofthe lower surface of the row tool 218. The row bar 14 is formed with aplurality of magnetic head elements and an electrical lapping guideelement (ELG element) as a lap monitoring resistance element. In lappingthe row bar 14, a relay printed circuit board is mounted on a front endsurface 218 a of the row tool 218, and pads of the relay printed circuitboard and terminals of the ELG element are connected together by wirebonding, so as to measure a change in resistance of the ELG element.

[0126] The pressure in lapping the row bar 14 bonded to the row tool 218is determined by the self-weight of the lap head 214 shown in FIG. 35and the pressure applied to the lap head 214 by the pneumatic cylinders222 shown in FIG. 35. This pressure is set high during the rough lappingand set low during the finish lapping. Fine adjustment of this pressureis achieved by a thrust applied to each bend cell 236 of the row tool218. That is, a pneumatic pressure regulated by each electro-pneumaticconversion regulator 232 is supplied to the air plate 220 to fill thecorresponding rectangular hole 250 shown in FIG. 38 and thereby generatea thrust expressed below.

Thrust F(N)=Pressure P(Mpa)×Area S(m²)

[0127] Accordingly, the upper surface of each bend cell 236 of the rowtool 218 is pushed by this thrust. Since the row tool 218 has a parallelspring mechanism as mentioned above, the row tool 218 is slightlydisplaced in a direction of arrow A in FIG. 38 at a portion near the rowbar 14.

[0128] The displacement of the row tool 218 is dependent on the airpressure supplied, so that local deformation of the row bar 14 can becorrected to allow straight lapping by applying the air pressureregulated by each electro-pneumatic conversion regulator 232corresponding to each bend cell 236. When the air pressure is suppliedto the air plate 220, the row tool 218 and the air plate 220 may beseparated from each other, so that the air plate 220 is fixed by twoscrews to the row tool 218 at a portion shown by the arrow 221 asmentioned above.

[0129] Although the air supplied leaks slightly from between the airplate 220 and the row tool 218, the contact surfaces of the air plate220 and the row tool 218 are polished so as to have a flatness of 2 μmor less, thereby obtaining a substantially linear relation between thesupplied air pressure and the displacement of each bend cell 236. If theair leakage is large, the absolute displacement of each bend cell 236becomes small and the hysteresis is also large. Therefore, the airleakage must be minimized.

[0130] The row tool 218 has the plural bend cells 236 and the pair offixed cells 238 formed on the opposite sides of the bend cells 236.Since the width of each fixed cell 238 is larger than the width of eachbend cell 236, the rigidity of each fixed cell 238 is higher than therigidity of each bend cell 236. Accordingly, in actually lapping the rowbar 14 bonded to the row tool 218 as shown in FIG. 39, a distributedload (lap pressure) is applied from the lap plate 202 to the row bar 14as shown in FIG. 40A, so that the bend cells 236 are deformed more thanthe fixed cells 238, and the row bar 14 is deformed so that its centralportion is raised as shown in FIG. 40B.

[0131] That is, the row bar 14 automatically becomes a “drawn” conditionwithout the need for bending, and the row bar 14 is subjected to bendcontrol from this offset condition, so that “drawing” is not required inthe present invention. FIG. 41 is a schematic view for illustrating abend condition. That is, the air pressure supplied to the air plate 220is controlled in the range of 0 to 0.5 MPa to change the thrust appliedto each bend cell 236 of the row tool 218 as shown by arrows 254 in FIG.41. By performing difference control with the fixed cells 238 andarbitrarily displacing the bend cells 236, a target shape of the row bar14 can be obtained to realize high-precision lapping.

[0132] Referring to FIG. 42, there is shown a sectional view of a rowtool assembly 260 employing an air lead frame 264. The row tool assembly260 is composed of a row tool 262, the air lead frame 264 inserted inthe row tool 262, and an air plate 266 fixed to the row tool 262. Therow tool 262 has a rectangular hole 268, an L-shaped hole 270, and aninsert hole 272 extending horizontally and opening to a front endsurface 262 a of the row tool 262. A pair of parallel thin-walledportions 274 and 276 are formed by the rectangular hole 268 and theL-shaped hole 270. These thin-walled portions 274 and 276 constitute aparallel spring mechanism

[0133] The air lead frame 264 is inserted in the insert hole 272 of therow tool 262. FIG. 43A is a plan view of the air lead frame 264, andFIG. 43B is a cross section taken along the line B-B in FIG. 43A. Asshown in FIGS. 43A and 43B, the air lead frame 264 has a plurality ofoblong air reservoirs 278 each defined by a closed projection 280, and aplurality of slits 284 respectively corresponding to a plurality ofslits (not shown) formed in the row tool 262. The air reservoirs 278 ofthe air lead frame 264 are formed by etching, for example. A rubbercoating or resin coating 282 is provided on the upper end of eachprojection 280.

[0134] Like the row tool 218 shown in FIG. 37, the row tool 262 has aplurality of bend cells formed by the plural slits and a pair of fixedcells formed on the opposite sides of the bend cells. The row tool 262is formed with a plurality of holes 286 respectively communicating withthe plural air reservoirs 278 of the air lead frame 264 inserted in therow tool 262. The air plate 266 is formed with a plurality of holes 288respectively communicating with the plural holes 286 of the row tool262. A seal 290 such as an O-ring is interposed between each hole 286 ofthe row tool 262 and the corresponding hole 288 of the air plate 266, soas to prevent the air leakage.

[0135] The air lead frame 264 has a thickness of 0.2 mm or less. Sincethe air lead frame 264 is a thin sheet, the air lead frame 264 isdeformed as shown by a, phantom line in FIG. 42 by the air supplied intothe air reservoirs 278, so that the row bar 14 is slightly displaced.Accordingly, by changing the supplied air pressure in an analog fashionby means of electro-pneumatic conversion regulators, the displacement ofthe row bar 14 can be arbitrarily set.

[0136] The air leakage from each air reservoir 278 of the air lead frame264 can be prevented by the rubber coating or resin coating 282 cominginto contact with the inner surface of the insert hole 272 of the rowtool 262. Further, the air leakage from between the row tool 262 and theair plate 266 can be prevented by the seals 290. Accordingly, thecontact surfaces of the row tool 262 and the air plate 266 in the rowtool assembly 260 are not required to have a high flatness unlike therow tool 218 and the air plate 220 shown in FIG. 38.

[0137] While the row bar 14 is in the form of a flat bar in which aplurality of magnetic head elements are arranged in a row, the presentinvention is also applicable to a row bar 14A as shown in FIG. 44A or arow bar 14B shown in FIG. 44B. As shown in FIG. 44A, the row bar 14A isin the form of a partially cut bar such that a plurality of magnetichead elements are separated from each other. As shown in FIG. 44B, therow bar 14B is in the form of independent workpieces such that aplurality of magnetic head elements are completely isolated from eachother.

[0138] According to the row bar preparation method of the presentinvention, the bonding and cutting are performed in the condition thatthe rigidity of each member is increased, so that the distortion andwarpage of the row bar bonded to the row tool can be reduced to therebyimprove the quality of products. According to the bonding apparatus ofthe present invention, the bonding of the row block and the dummy waferor the bonding of the integrated block and the row tool can beefficiently performed.

[0139] According to the row bar lapping method and lapping apparatus ofthe present invention, the displacement of the row bar can be controlledat multiple points, so that a target shape of the row bar can be easilyobtained to realize high-precision lapping.

[0140] The present invention is not limited to the details of the abovedescribed preferred embodiments. The scope of the invention is definedby the appended claims and all changes and modifications as fall withinthe equivalence of the scope of the claims are therefore to be embracedby the invention.

What is claimed is:
 1. A method comprising the steps of: cutting a waferto prepare a row block having a plurality of head elements arranged in amatrix; bonding a plate member to one side surface of said row block;bonding a row tool to another side surface of said row block bonded tosaid plate member opposite to said one side surface; and cutting saidrow block to prepare a row bar bonded to said row tool and having a rowof said head elements.
 2. A method according to claim 1, wherein saidplate member comprises a dummy wafer.
 3. A method according to claim 1,further comprising the steps of: bonding another row tool to a cutsurface of said row block remaining after said cutting step; andrepeating said cutting step for said remaining row block.
 4. Anapparatus for bonding a row block having a plurality of head elementsarranged in a matrix to a plate member, comprising: a carrier blockhaving a positioning pin for positioning said row block; an adhesiveapplying assembly for applying an adhesive to one side surface of saidplate member; a rinking assembly having a clamper for clamping saidplate member mounted on said carrier block, a drive mechanism forreciprocating said clamper, and a first presser block for pressing saidrow block mounted on said carrier block against said one side surface ofsaid plate member; and a bonding assembly having a positioning block forpositioning said plate member and said row block mounted on said carrierblock, a second presser block for pressing said row block against saidone side surface of said plate member, and an air nozzle for sprayingair to a bonding portion between said row block and said plate member.5. An apparatus according to claim 4, further comprising: a firstpreheating assembly for preheating said plate member; a secondpreheating assembly for preheating said row block; and a rail assemblyhaving a first block for mounting said plate member and a second blockfor substantially vertically holding said plate member in cooperationwith said first block.
 6. An apparatus according to claim 4, whereinsaid carrier block is in L-shaped configuration and has a hole forvacuum suction.
 7. An apparatus according to claim 5, wherein: saidfirst block of said rail assembly is in L-shaped configuration; saidrail assembly further having a third block for pushing one end of saidplate member mounted on said L-shaped first block, and a heater forheating said first block.
 8. An apparatus according to claim 5, whereinsaid adhesive applying assembly has a syringe for dispensing saidadhesive, a temperature control block for heating said syringe to agiven temperature, a cylinder for vertically moving said syringe, and arobot for moving said syringe along said rail assembly.
 9. An apparatusaccording to claim 4, wherein said bonding assembly further has a pushblock for pushing side surfaces of said plate member and said row blockpositioned by said positioning block on the opposite side of saidpositioning block.
 10. An apparatus according to claim 4, wherein saidbonding assembly further has a bonding base for mounting said carrierblock, said bonding base having holes for vacuum suction of said carrierblock, said plate member, and said row block.
 11. An apparatus forbonding a row tool to a first side surface of a row block, a platemember being preliminarily bonded to a second side surface of said rowblock opposite to said first side surface, said apparatus comprising: acarrier block having a positioning pin for positioning said row block; arail assembly having a first block for mounting said row tool and asecond block for substantially vertically holding said row tool incooperation with said first block; an adhesive applying assembly forapplying an adhesive to one side surface of said row tool held in saidrail assembly; a rinking assembly having a rinking base for mountingsaid carrier block, a clamper for clamping said row tool mounted on saidcarrier block, a drive mechanism for reciprocating said clamper, and afirst presser block for pressing said row block mounted on said carrierblock against said one side surface of said row tool; and a bondingassembly having a bonding base for mounting said carrier block, apositioning block for positioning said carrier block, said row block,and said row tool mounted on said carrier block, and a second presserblock for pressing said row block against said one side surface of saidrow tool.
 12. An apparatus for lapping a row bar having a plurality ofhead elements arranged in a row, comprising: a lap plate for providing alapping surface; a row tool having a plurality of bend cells formed by aplurality of slits; a presser mechanism for pressing said row tooltoward said lapping surface of said lap plate; and a compressed airsource for supplying an air pressure to each of said bend cells.
 13. Anapparatus according to claim 12, further comprising: an air plate fixedto an upper surface of said row tool and having a plurality of holesrespectively corresponding to said plurality of bend cells; and aplurality of electro-pneumatic conversion regulators provided betweensaid compressed air source and said air plate and respectively connectedto said plurality of holes of said air plate.
 14. An apparatus accordingto claim 12, wherein said row tool further has a parallel springmechanism and a pair of fixed cells formed on the opposite sides of saidbend cells, each of said fixed cells having a width larger than that ofeach of said bend cells.
 15. An apparatus according to claim 14, whereinsaid presser mechanism has a lap head for pressing said row bar on saidlapping surface by a self-weight, and a pneumatic cylinder foradjustably applying a lapping pressure to said lap head.
 16. A method oflapping a row bar having a plurality of head elements arranged in a row,comprising the steps of: providing a lapping surface by a lap plate;pressing said row bar bonded to a lower surface of a row tool having aplurality of bend cells formed by a plurality of slits, against saidlapping surface; and applying individually adjustable air pressures tosaid bend cells, respectively; whereby said row bar is displaced atmultiple points in lapping.
 17. A row tool to which a row bar having aplurality of head elements arranged in a row is adapted to be bonded,comprising: a plurality of bend cells formed by a plurality of slits; apair of fixed cells formed on the opposite sides of said bend cells,each of said fixed cells having a width larger than that of each of saidbend cells; and a parallel spring mechanism.
 18. A row tool according toclaim 17, wherein said row tool has an upper surface having a flatnessof 3 μm or less.
 19. A row tool assembly comprising: a row tool havingan upper surface, a plurality of bend cells formed by a plurality ofslits, a parallel spring mechanism, an insert hole extendinghorizontally, and a plurality of first holes communicating with saidinsert hole and opening to said upper surface; an air lead frameinserted in said insert hole of said row tool and having a plurality ofair reservoirs respectively communicating with said first holes of saidrow tool; and an air plate fixed to said upper surface of said row tooland having a plurality of second holes respectively communicating withsaid first holes of said row tool.
 20. A row tool assembly according toclaim 19, wherein: said air lead frame further has a plurality of secondslits respectively corresponding to said slits of said row tool; andeach of said air reservoirs is defined by a closed projection; saidclosed projection having an upper end provided with a coating kept incontact with an inner surface of said insert hole of said row tool.